Process and apparatus for the coating or modification of...

Coating processes – Coating by vapor – gas – or smoke

Reexamination Certificate

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C427S249110

Reexamination Certificate

active

07410669

ABSTRACT:
In a process according to the invention and an apparatus according to the invention for the coating or modification of a surface a flow of a first gaseous phase or of a first aerosol comprising one or more precursor compounds is guided along a heated filament so that the precursor compounds are converted into reactive compounds. Alternatively, non-activated particles are guided along a heated filament so that these are activated and are then combined with a gaseous phase or an aerosol comprising a plurality of precursor compounds, so that the precursor compounds are thereby converted into reactive compounds. The reactive compounds formed according to at least one of the two aforementioned steps are guided onto a substrate that is exposed to atmospheric pressure, so that a layer is deposited on the substrate or its surface is modified.

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Haubner, R. et al: “Diamond growth by hot-filament chemical vapor deposition: state art,” Diamond and Related Materials, Elsevier Science Publishers, Amsterdam, NL, vol. 2, 1993, pp. 1277-1294.
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