Optics: measuring and testing – Photometers – Photoelectric
Patent
1996-08-01
1998-06-09
Nelms, David C.
Optics: measuring and testing
Photometers
Photoelectric
356213, 356222, 356 73, G01J 142
Patent
active
057643520
ABSTRACT:
Optical measuring apparatus for determining chromaticity of thin films on a substrate includes a light source for illuminating the substrate and a measuring apparatus for dispersing light into various wavelengths and making wavelength dependent intensity measurements. Radiation from the light source is reflected or transmitted by the substrate to the measuring apparatus along a first beam path having a first diaphragm for cutting off the radiation from the substrate in a leak-tight manner. Radiation from the light source is also transmitted to the measuring apparatus directly along a second beam path having a second diaphragm for cutting off radiation from the light source in a leak-tight manner. The light source (6a) consists of a globe photometer (6a), in which a lamp (4) is provided. A steadily burning light source, especially a halogen lamp, is used as the lamp (4). Long-term instabilities are corrected essentially by means of a white reference standard, whereas short-term instabilities are corrected under consideration of the characteristic emission spectrum of the selected lamp (4). For determining the chromaticity of reflecting and transparent thin-film layers applied to substrate, a process for reflectance curve determination is used, in which apparatus-related instabilities interfering with the chromaticity measurement are corrected by normalization of the measured relative spectral energy distributions to the current measurement light spectrum and by taking into consideration the effects of foreign light on the measurement light spectrum.
REFERENCES:
patent: 3874799 (1975-04-01), Isaacs
patent: 4093991 (1978-06-01), Christie, Jr. et al.
patent: 4565444 (1986-01-01), Mactaggart
patent: 4669873 (1987-06-01), Wirz
patent: 4770530 (1988-09-01), Van Aken et al.
patent: 4802763 (1989-02-01), Gerlinger et al.
patent: 4878757 (1989-11-01), Westphal
patent: 4919535 (1990-04-01), Hohberg et al.
patent: 4948256 (1990-08-01), Lin et al.
patent: 4961646 (1990-10-01), Schrammli et al.
patent: 5384641 (1995-01-01), Imura
patent: 5453829 (1995-09-01), Remer et al.
patent: 5481380 (1996-01-01), Bestmann
patent: 5497229 (1996-03-01), Sensui et al.
Abele, "Industrieroboter in der Montage" Technische Rundschau 26/85, S. 26, 28-31, 33.
Basler Ulrich
Gobel Jurgen
Kappel Peter
Lenz Werner
Mondry Jens
Balzers Und Leybold Deutschland Holding AG
Nelms David C.
Ratliff Reginald A.
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