Process and apparatus for recovering and reusing resist composit

Details Process and apparatus for recovering and reusing resist composit Process and apparatus for recovering and reusing resist composit

1989-10-23

1992-01-28

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Process of treating scrap or waste product containing solid...

427345, C08J 1104

Patent

active

050844830

ABSTRACT:
The present invention relates to a process for recovering and reusing a resist composition which comprises the steps of (a) collecting resin composition scattered from a spinner during application of the resist composition onto silicon wafers and otherwise no longer used and to be disposed of as waste liquid; (b) introducing the resist composition into a recovery tank; (c) introducing, while measuring the viscosity of the resist composition in the recovery tank, a solvent into the recovery tank in accordance with the measured viscosity until the resist composition shows a predetermined viscosity; (d) discontinuing the solvent supply when the viscosity of the resist composition has reached a predetermined value; (e) transferring the resist composition with the predetermined viscosity to a storage tank; and (f) taking out, whenever necessary, the resist composition from the storage tank for reuse.

REFERENCES:
patent: 2711750 (1955-06-01), Norcross
patent: 2848353 (1958-08-01), Norris
patent: 2968638 (1961-01-01), Meckler
patent: 3831616 (1974-08-01), Weyers
patent: 4426877 (1984-01-01), Srivasta
patent: 4607592 (1986-08-01), Richter
Abstract of Japances Patent 59-9654, Jan. 1984.

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