Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Reexamination Certificate
2011-08-23
2011-08-23
Mayekar, Kishor (Department: 1759)
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
Reexamination Certificate
active
08002954
ABSTRACT:
The invention relates to a process for the purification's of silicon tetrachloride or germanium tetrachloride contaminated with at least one hydrogen-containing compound, in which the silicon tetrachloride or germanium tetrachloride to be purified is treated in a targeted manner by means of a cold plasma and purified silicon tetrachloride or germanium tetrachloride is isolated from the phase which has been treated in this way. The present invention further relates to an apparatus for carrying out the process of the invention, which comprises a stock and vaporization unit for silicon or germanium tetrachloride (4.1or5.1) which is connected via a connecting line with the inlet of the reactor (4.3or5.3) with control unit (4.4or5.4) for producing the dielectrically hindered discharges whose outlet leads via a pipe either directly or indirectly via at least one further reactor (5.5) to a condensation unit (4.5or5.11) with downstream collection vessel (4.6or5.12) which is connected via an offtake line (4.6.2or5.12.1) to a distillation unit (4.8or5.13) and, if appropriate, is equipped with a feed line (4.6.1) to the unit (4.1).
REFERENCES:
patent: 4923687 (1990-05-01), Schork et al.
patent: 5026533 (1991-06-01), Matthes et al.
patent: 5616755 (1997-04-01), Seiler et al.
patent: 5654459 (1997-08-01), Kropfgans et al.
patent: 5698726 (1997-12-01), Rauleder et al.
patent: 5852206 (1998-12-01), Horn et al.
patent: 6100418 (2000-08-01), Standke et al.
patent: 6150551 (2000-11-01), Kropfgans et al.
patent: 6177584 (2001-01-01), Loewenberg et al.
patent: 6222056 (2001-04-01), Bade et al.
patent: 6291698 (2001-09-01), Bade et al.
patent: 6372190 (2002-04-01), Zehe et al.
patent: 6585941 (2003-07-01), Zehe et al.
patent: 6680038 (2004-01-01), Rauleder et al.
patent: 6727375 (2004-04-01), Steding et al.
patent: 7204963 (2007-04-01), Rauleder et al.
patent: 7410914 (2008-08-01), Kuehnle et al.
patent: 7507850 (2009-03-01), Muh et al.
patent: 2008/0283972 (2008-11-01), Muh et al.
patent: 2008/0289690 (2008-11-01), Sonnenschein et al.
patent: 2009/0259063 (2009-10-01), Lang et al.
patent: 2010/0296994 (2010-11-01), Rauleder et al.
U.S. Appl. No. 12/999,240, filed Dec. 15, 2010, Seliger, et al.
U.S. Appl. No. 12/065,126, filed Feb. 28, 2008, Lang, et al.
U.S. Appl. No. 12/738,246, filed Apr. 15, 2010, Rauleder, et al.
U.S. Appl. No. 12/811,925, filed Jul. 7, 2010, Mueh, et al.
U.S. Appl. No. 12/738,799, filed Jul. 13, 2010, Rauleder, et al.
U.S. Appl. No. 12/812,857, filed Jul. 14, 2010, Mueh, et al.
U.S. Appl. No. 12/681,114, filed Apr. 1, 2010, Mueh, et al.
U.S. Appl. No. 12/524,371, filed Jul. 24, 2009, Lang, et al.
U.S. Appl. No. 12/528,087, filed Aug. 21, 2009, Schwarz, et al.
Lang Jürgen
Nicolai Rainer
Popp Hanns-Peter
Rauleder Hartwig
Evonik Degussa GmbH
Mayekar Kishor
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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