Process and apparatus for production of diamond-like films

Details Process and apparatus for production of diamond-like films Process and apparatus for production of diamond-like films

1982-01-14

1994-11-22

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118726, 427249, C23C 1400

Patent

active

053665562

ABSTRACT:
A process for production of diamond-like films comprising the steps of physically ablating a source of carbon in the vicinity of a substrate such that a carbon film grows on the substrate through bonding of carbon atoms in graphitic form and aliphatic form; and physically discriminating the carbon film during growth thereof by supressing or etching the graphitic form within the carbon film while permitting the aliphatic form to remain thereby resulting in a diamond-like film.

REFERENCES:
patent: 3030188 (1962-04-01), Eversole et al.
patent: 4986214 (1991-01-01), Zumato
patent: 4987007 (1991-01-01), Wagal
patent: 5098737 (1992-03-01), Collins
patent: 5242711 (1993-09-01), DeNatale
Robertson, "Clustering and Gap States in Amorphous Carbon", Philosophical Magazine Letters (1988) vol. 57, No. 2, pp. 143-148.
Bachman, Messier, "Emerging Technology of Diamond Thin Films", Chemical & Engineering News (May 15, 1989) pp. 24-39.
Yarbrough, Messier, "Current Issues and Problems in the Chemical Vapor Deposition of Diamond", Science, 9 Feb. 1990, vol. 247, pp. 688-696.
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Spitsyn, Bouilov, Derjaguin, "Vapor Growth of Diamond on Diamond and Other Surfaces", Journal of Crystal Growth, 52 (1981) pp. 219-226.
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Fedoseev, Bukhovets, Varshavskaya, Lavrentev, Derjaguin, "Transition of Graphite into Diamond in a Solid Phase Under the Atmospheric Pressure", (proceedings unknown), vol. 21, No. 3, pp. 237-241 (1983).
Bourdon, Duley, Jones, Prince, "Characterization of Diamond-Like Films Prepared by Laser Ablation of Graphite", Surface and Coatings Technology, 47 (1991) pp. 509-516.
Bourdon, Prince, "Growth Mechanisms of Diamond-Like Films Formed by Laser Ablation of Graphite", Applied Surface Science 48/49 (1991) pp. 50-54; (Accepted for Publication 20 Aug. 1990).
Narayan, Godbole, White, "Laser Method for Synthesis and Processing of Continuous Diamond Films on Nondiamond Substrates", Science, Mar. 1991, vol. 252, pp. 416-418.
R. A. Collins, Paper presented at Diamond Films '90, Crans Montana, Switzerland, Sep. 1990, published in Surface and Coatings Technology, Jun. 1991. U.S. Patent awarded 1990 (number unknown at this time).
Yarbrough, Roy, Diamond and Diamond-Like Materials Synthesis, Johnson, Badzian and Geis, Eds., Materials Research Society, Pittsburgh, 1988, p. 33.

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