Process and apparatus for producing phosphine-containing gas

Details Process and apparatus for producing phosphine-containing gas Process and apparatus for producing phosphine-containing gas

1996-06-07

2000-02-22

Shippen, Michael L.

Compositions

Gaseous compositions

C01B 2506

Patent

active

060276673

ABSTRACT:
A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolyzable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO.sub.2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.

REFERENCES:
patent: 4814154 (1989-03-01), Doermmann et al.
patent: 5573740 (1996-11-01), Banks et al.

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