Process and apparatus for producing diamond film

Coating apparatus – Gas or vapor deposition – Work support

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118715, 423446, 427249, 427250, 427577, C23C 1600

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active

053383648

ABSTRACT:
A process and apparatus for producing a diamond film from a gas phase, in which a fuel gas is burnt by oxygen gas in a torch, to thereby provide a gas flame jet having a high temperature and high speed sufficient to form a high quality diamond film on a substrate, by an unlimited use of various kinds of combustible carbon compound gases as the fuel gas. A process and apparatus for producing a diamond film from a gas phase, in which a thermal spray material is fed to a combustion flame to thereby form an intermediate layer of a mixture of the thermal spray material and diamond between a substrate and a diamond film, to thereby provide a high purity diamond film having an improved adhesion to the substrate.

REFERENCES:
patent: 4416421 (1983-11-01), Browning
patent: 4645977 (1987-02-01), Kurokawa et al.
patent: 4938940 (1990-07-01), Hirose
patent: 4981671 (1991-01-01), Moriyoshi
Hirose et al., "New Diamond", 1988, No. 10, p. 34, (partial translation attached).

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