Process and apparatus for producing agglomerate rays

Details Process and apparatus for producing agglomerate rays Process and apparatus for producing agglomerate rays

1993-07-29

1995-07-11

Berman, Jack I.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

392389, H05H 300

Patent

active

054323410

ABSTRACT:
During the production of intensive cluster rays of high boiling point substances for depositing thin layers by the expansion of vapor of the substance to be clustered through a nozzle, a nozzle admission pressure of at least 200 hectopascals is set when the nozzle has a throat width in the range of 0.2 to 1 mm and a divergent outlet portion with an opening angle between about 3.degree. and 30.degree.. Thermal radiation losses from the throat region of the nozzle, which can lead to the undesired emission of larger droplets, are minimized by a heated cover connected to the outlet portion of the nozzle.

REFERENCES:
patent: 4217855 (1980-08-01), Takagi
patent: 4812326 (1989-03-01), Tsukazaki et al.
patent: 4833319 (1989-05-01), Knauer
patent: 4856457 (1989-08-01), Knauer
patent: 5099791 (1992-03-01), Tsukazaki et al.

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