Process and apparatus for preparing YBaCuO superconducting films

Details Process and apparatus for preparing YBaCuO superconducting films Process and apparatus for preparing YBaCuO superconducting films

1995-08-25

1997-04-22

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

505732, 505500, 505742, 427 62, 118715, 118725, 118719, C23C 1424, B05D 512

Patent

active

056229186

ABSTRACT:
A process for preparing an YBCO oxide thin film which has a crystalline, clean and smooth surface on a substrate. The process is conducted by using an apparatus comprising a vacuum chamber in which an oxidizing gas of O.sub.2 including O.sub.3 can be supplied near the substrate so that pressure around the substrate can be increased while maintaining high vacuum near an evaporation source and K cell evaporation sources arranged in the vacuum chamber wherein the substrate is heated, molecular beam of constituent atoms of the oxide excluding oxygen are supplied from the K cell evaporation sources, and a chilled oxidizing gas is locally supplied to the vicinity of the substrate.

REFERENCES:
patent: 5004721 (1991-04-01), DeLozanne
patent: 5039657 (1991-08-01), Goldman et al.
patent: 5143896 (1992-09-01), Harada et al.
Achutharaman et al, Thin Solid Films, 216 (1992) pp. 14-20.

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