Process and apparatus for organic vapor jet deposition

Details Process and apparatus for organic vapor jet deposition Process and apparatus for organic vapor jet deposition

2002-09-04

2008-10-07

Meeks, Timothy (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

Organic coating applied by vapor, gas, or smoke

C427S255230

Reexamination Certificate

active

07431968

ABSTRACT:
A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block onto a cooled substrate, to form a patterned organic film. A device for carrying out the method is also provided. The device includes a source of organic vapors, a source of carrier gas and a vacuum chamber. A heated nozzle block attached to the source of organic vapors and the source of carrier gas has at least one nozzle adapted to eject carrier gas and organic vapors onto a cooled substrate disposed within the vacuum chamber.

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