Process and apparatus for minimizing thermal gradients...

Details Process and apparatus for minimizing thermal gradients... Process and apparatus for minimizing thermal gradients...

2006-11-07

2006-11-07

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S005000

Reexamination Certificate

active

07132206

ABSTRACT:
A method and system to minimize the affects of thermal gradient distortion in reticles. A heat source and filter or filters are used to control which part or parts of the reticle receive additional radiation. The heat created by this additional radiation minimizes any thermal gradients across the mask by supplying a constant heat flux to the entire surface of the mask. The heat source can also be used to preheat the reticle to minimize any transient start-up effects.

REFERENCES:
patent: 6228540 (2001-05-01), Kobayashi
patent: 6626236 (2003-09-01), Bandoh et al.

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