Process and apparatus for measuring charge quantity flowing in a

Details Process and apparatus for measuring charge quantity flowing in a Process and apparatus for measuring charge quantity flowing in a

1995-02-13

1997-07-01

Regan, Maura K.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Beam of atomic particles

324464, 250397, G01R 2726

Patent

active

056442203

ABSTRACT:
For measuring the charge transported in an ion or electron beam, collecting grids are provided in a cascaded manner and the galvanic currents occurring there are measured. The same surface range is measured on the collecting cascade with respect to the particle current in the vacuum. The process and apparatus have particular applicability in partial-pressure and total-pressure measuring apparatuses, e.g. mass spectrometers and Bayard-d'Alpert tubes.

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