Process and apparatus for generating and igniting a low-voltage

Details Process and apparatus for generating and igniting a low-voltage Process and apparatus for generating and igniting a low-voltage

1993-05-11

1995-01-24

Breneman, R. Bruce

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20429841, 427580, 118723HC, C23C 1434

Patent

active

053840186

ABSTRACT:
A cathode chamber (1) with a thermionic cathode (3) generates a low-voltage arc discharge in a vacuum treatment chamber (11). Arcing on wall portions of the treatment chamber (11) is prevented by providing a screen (20), operated so as to be electrically floating, in the region of a diaphragm (9), through which diaphragm (9) the discharge is drawn from the cathode chamber (1) into the treatment chamber (11). The discharge is ignited by impressing portions of the cathode chamber wall with the ignition potential, with respect to the potential of the cathode (3).

REFERENCES:
patent: 4123316 (1978-10-01), Tsuchimoto
patent: 4346123 (1982-08-01), Kaufmann
patent: 4877505 (1989-10-01), Borgmann
patent: 5113790 (1992-05-01), Geisler et al.
patent: 5192578 (1993-03-01), Ramm et al.
patent: 5250779 (1993-10-01), Kaufmann et al.

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