Process and apparatus for electronic control of the transfer and

Details Process and apparatus for electronic control of the transfer and Process and apparatus for electronic control of the transfer and

1992-09-21

1994-07-19

Kashnikow, Andres

Dispensing

Processes of dispensing

222 61, 222 71, 222135, 222152, 222189, 222318, 222399, 137208, 137205, 137209, B67D 508

Patent

active

053300726

ABSTRACT:
The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing a series of vessels arranged in parallel, a vacuum system to draw chemical from one or more bulk sources into the vessels, and a pressure system to deliver chemical under pressure from the vessels, chemicals can be easily delivered from any bulk source to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous and uniform chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure. Computer controlled process systems provides system flexibility and full automation.

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