Process and apparatus for determining the carrier concentration

Details Process and apparatus for determining the carrier concentration Process and apparatus for determining the carrier concentration

1991-07-11

1993-08-17

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324719, G01R 3126

Patent

active

052372669

ABSTRACT:
The invention relates to apparatus and method for determining the carrier concentration profile of the carrier concentration in semiconductor materials, multi-layer semiconductor structures and semiconductor devices. According to the invention, applied between an ohmic contact and a rectifying contact formed on the semiconductor are a d.c. voltage resulting in a reverse bias, and two periodic excitation signals having frequencies .OMEGA..sub.1 and .OMEGA..sub.2. Frequency .OMEGA..sub.1 is greater than .OMEGA..sub.2 such that .OMEGA..sub.1, .OMEGA..sub.2, their difference (.OMEGA..sub.2 -.OMEGA..sub.2) and their sum (.OMEGA..sub.1 +.OMEGA..sub.2) are in the same order of magnitude. Two components from the semiconductor's electronic response to the excitation are selected for analysis. The first component is the response to the frequency .OMEGA..sub.1 or .OMEGA..sub.2, and the second component is a first order intermodulation product of one of .OMEGA..sub.1 and .OMEGA..sub.2. Carrier concentration is determined by simultaneous parallel analysis of these first and second components.

REFERENCES:
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patent: 4028207 (1977-06-01), Faktor et al.
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patent: 4313212 (1982-01-01), Whitlock
patent: 4325025 (1982-04-01), Corcoran et al.
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PCT Search Report PCT/HU/91/00035, filed Jul. 12, 1990.

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