Process and apparatus for converting spent etchants

Details Process and apparatus for converting spent etchants Process and apparatus for converting spent etchants

1994-12-05

1996-10-01

Powell, William

Etching a substrate: processes

Nongaseous phase etching of substrate

Recycling, regenerating, or rejunevating etchant

156345, 216105, C23F 100

Patent

active

055608388

ABSTRACT:
Cupric chloride etchant waste is converted into non-hazardous material consisting of copper oxide and salt water. The cupric chloride etchant is preheated and a stream of the etchant is combined with a stream of preheated caustic solution. A neutralization reaction occurs in the mixed stream which is directed to a mixing tank. The reaction completes in the mixing tank without addition of heat, producing fine copper oxide which is filtered out from the salt water. The entire apparatus for carrying out the process can be integrated into a single portable unit.

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patent: 5211843 (1993-05-01), Wester et al.
patent: 5227010 (1993-07-01), Lubert et al.
patent: 5248398 (1993-09-01), Cordani

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