Process and apparatus for contamination-free processing of semic

Details Process and apparatus for contamination-free processing of semic Process and apparatus for contamination-free processing of semic

1995-08-22

1996-12-24

Hoang, Tu

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219390, F27B 906

Patent

active

055870953

ABSTRACT:
This invention relates generally to a process and apparatus for contamination-free processing of semiconductor parts. More specifically, this invention relates to a process and apparatus for contamination-free processing of semiconductor parts in an oven or a furnace. This invention also relates to a process and apparatus for contamination-free processing of semiconductor parts in a furnace, such as a belt type furnace that sequentially stops the belt at the vicinity of at least one heating or cooling unit to heat or cool the part.

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