Process and apparatus for contamination-free processing of semic

Details Process and apparatus for contamination-free processing of semic Process and apparatus for contamination-free processing of semic

1995-06-07

1996-08-27

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219385, 219407, 432 9, F27B 504

Patent

active

055503519

ABSTRACT:
An apparatus for contamination-free treating semiconductor parts in a furnace. A carrier into which the semiconductor parts are placed has a cover placed over the carrier to form a boat enveloping the parts while the parts are treated in a furnace. The boat preserves an environment less contaminated than the furnace interior, and may have heating elements embedded in the carrier or cover.

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