Process and apparatus for coating microcavities

Details Process and apparatus for coating microcavities Process and apparatus for coating microcavities

1986-07-22

1990-04-10

Nguyen, Nam X.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20429805, 427 38, 118723, C23C 1434

Patent

active

049158066

ABSTRACT:
A process for coating substrates which has microcavities comprises coating the substrate surface under a vacuum with a predetermined substance to form a layer of the substance deposited on the surface and in the cavity. Directing subsequent layers onto the substrate with an ion bombardment so as to cause the molecular beams of the coating substance to strike the cavities at divergence angles of not greater than 10.degree..

REFERENCES:
patent: 3756193 (1973-09-01), Carmichael et al.
patent: 4109061 (1978-08-01), Beale et al.
patent: 4140546 (1979-02-01), Krimmel et al.
patent: 4385975 (1983-05-01), Chu et al.
patent: 4401719 (1983-08-01), Kobayashi et al.
patent: 4468437 (1984-08-01), Patten et al.

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