Process and apparatus for cleaning MOS-LSI die

Details Process and apparatus for cleaning MOS-LSI die Process and apparatus for cleaning MOS-LSI die

1976-01-29

1977-01-18

Kellogg, Arthur D.

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

134 25R, 134 88, 134 95, 134104, 134151, B08B 3000

Patent

active

040033929

ABSTRACT:
A process and apparatus for cleaning particles from the surfaces of MOS-LSI die is disclosed. The present invention involves cleaning apparatus that includes a process tank, a manifold fixture that secures a plurality of universal inserts having variable die size cavities and a multi-nozzle agitator assembly that attaches to said manifold fixture having means for directing pressurized gas and fluid means. The die inserts are selected, fitted and secured in the cavities of the manifold fixture. The dice are installed and secured in the die inserts. The loaded manifold fixture is positioned over the process tank where the dice are rinsed with deionized water, rinsed with alcohol, inspected, scrubbed, pressure rinsed with deionized water, pressure rinsed with alcohol and dried with nitrogen, inspected and secured in clean die trays.

REFERENCES:
patent: 701129 (1902-05-01), Belknap
patent: 2916407 (1959-12-01), Buck et al.
patent: 3066050 (1962-11-01), Garton, Jr.
patent: 3405720 (1968-10-01), Carlson
patent: 3746022 (1973-07-01), Fillion et al.

Affiliated with

Also associated with

Rating

Process and apparatus for cleaning MOS-LSI die does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process and apparatus for cleaning MOS-LSI die, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process and apparatus for cleaning MOS-LSI die will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-66738