Procedure and facility for handling and transport of wafers in u

Details Procedure and facility for handling and transport of wafers in u Procedure and facility for handling and transport of wafers in u

1996-12-03

1998-07-14

Bucci, David A

Material or article handling

Device for emptying portable receptacle

Nongravity type

414786, B65G 4907

Patent

active

057794251

ABSTRACT:
A technique for handling discs, such as wafers for integrated circuits, which must be processed in ultra-clean rooms and which are transported to various workstations for processing. A horizontally extended rail has storage positions therealong where standard commercial carriers are positioned which contain vertically standing wafers. A lifting device can lift any carrier over neighboring carriers and moves it to a carrying basket located on an extension of the rail. The carrying basket is then turned by 90.degree. so that the vertical wafers lie horizontally. A tongue-shaped device can be moved under any of these wafers for removal thereof from the basket and subsequent transport to a workstation, and return.

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