Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Patent
1997-03-17
1998-07-21
Le, Que
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
25055945, 356430, G01N 2186
Patent
active
057838356
ABSTRACT:
A method and apparatus for probing with backside emission microscopy for locating defect sites in an integrated circuit specimen, where a first microscope positioned for observing the front side of the specimen and a second microscope positioned for observing the backside of the specimen. A carrier is provided for supporting the specimen in a plane perpendicular to the plane of the first and second microscopes. A white light camera is mounted on the first microscope for acquiring an illuminated image of the front side of the specimen, and generates its image as corresponding to site indicia of the backside of the specimen. A light emission sensitive camera mounted on the second microscope acquires a light emission image of the backside of the specimen in response to electrical test signals applied at terminals of the specimen by test probes. The light emission sensitive camera generates the emission image for superposing with the illuminated image to identify the location of defect sites in the specimen. In a described embodiment, the microscopes are rotatable between vertical and horizontal orientations, wherein the specimen is supported in a vertical plane for backside emission microscopy. Backside supports, e.g., a pair of supports, are positioned at the backside of the specimen leaving an area of interest exposed for observation with said second microscope.
REFERENCES:
patent: 4755874 (1988-07-01), Esrig et al.
patent: 5135303 (1992-08-01), Uto et al.
patent: 5266889 (1993-11-01), Harwood et al.
patent: 5345170 (1994-09-01), Schwindt et al.
Hollman Kenneth F.
Karlsson Hans E.
Le Que
Probing Solutions, Incorporated
LandOfFree
Probing with backside emission microscopy does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Probing with backside emission microscopy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probing with backside emission microscopy will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1649054