Probing of surface roughness

Details Probing of surface roughness Probing of surface roughness

1999-11-09

2002-05-07

Warden, Jill (Department: 1743)

Chemistry: analytical and immunological testing

Process or composition for determination of physical state...

Surface area, porosity, imperfection, or alteration

C436S525000

Reexamination Certificate

active

06383816

ABSTRACT:

BACKGROUND OF THE INVENTION
For many applications, the roughness features remaining on surfaces after polishing are required to be orders of magnitude smaller than the wavelength of light. It is difficult to determine in such a case when a material has been polished adequately because the present means of assessing roughness features smaller than the wavelength of light are either slow or indirect. We have invented a rapid means of detecting surface roughness features smaller than the wavelength of light.
SUMMARY OF THE INVENTION
Our invention detects roughness features rapidly by monitoring the fluorescence from molecules that adhere to roughness features. We have invented a rapid means of detecting surface roughness features smaller than the wavelength of light. The invention relates to tagging a protein with a dye, only if needed, on a substrate surface.


REFERENCES:
patent: 4222743 (1980-09-01), Wang
patent: 5242831 (1993-09-01), Oki
patent: 5965446 (1999-10-01), Ishikawa
patent: 6094300 (2000-07-01), Kashima et al.
patent: 6097484 (2000-08-01), McIntosh et al.

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