Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2005-03-03
2008-08-26
Nguyen, Vinh P (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S758010
Reexamination Certificate
active
07417445
ABSTRACT:
A prober for measuring the electrical characteristics of a test target object includes a tester, stage, probe card, first sensor, second sensor, and controller. The stage places a test target object thereon. The test target object has a plurality of electrical circuit devices on its surface. Each of the electrical circuit devices has a plurality of electrodes on its surface. The probe card is arranged above the stage. The probe has a plurality of probes. The probes are connected to the tester. The first sensor detects the positions of distal ends of the probes. The second sensor detects the surface position of an individual one of the electrical circuit devices. The controller brings the probes of the probe card and the electrodes of the electrical circuit devices into contact with each other.
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Sakagawa Hideo
Watanabe Takashi
Nguyen Vinh P
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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