Probing method

Details Probing method Probing method

2005-02-01

2005-02-01

Nguyen, Vinh P. (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S765010

Reexamination Certificate

active

06850052

ABSTRACT:
A prober of this invention includes a probe card, a main chuck, a shaft member fixed on and extending downwardly from the main chuck, an X table and Y table for retaining the shaft member by use of a guide to be freely movable in a vertical direction, and a contact body fixed on the shaft member. The undersurface of the contact body is made parallel to the mounting surface of the main chuck. The prober further includes an elevation body whose center coincides with an extension line downwardly extending from the test center of the probe card, and an elevation body elevating mechanism for vertically moving the elevation body and a ball provided on the upper portion of the elevation body is slidably set in contact with the undersurface of the contact body.

REFERENCES:
patent: 5321352 (1994-06-01), Takebuchi
patent: 5321453 (1994-06-01), Mori et al.
patent: 5404111 (1995-04-01), Mori et al.
patent: 5410259 (1995-04-01), Fujihara et al.
patent: 5436571 (1995-07-01), Karasawa
patent: 5510723 (1996-04-01), Canella et al.
patent: 5604446 (1997-02-01), Sano
patent: 5642056 (1997-06-01), Nakajima et al.
patent: 6417683 (2002-07-01), Colby
patent: 0 675 366 (1995-10-01), None
patent: 6-124982 (1994-05-01), None
patent: 9-33877 (1997-02-01), None

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