Probing equipment and a probing method

Details Probing equipment and a probing method Probing equipment and a probing method

1995-03-09

1996-06-11

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 731, 437 8, 382199, 439482, 414222, G01R 102

Patent

active

055259120

ABSTRACT:
A wafer prober comprises a wafer chuck for chucking a wafer and a probe card holding section for holding two or more probe cards. The wafer prober further comprises a test section for simultaneously testing a plurality of chips among chips in one wafer, with use of the two or more probe cards, while respectively making probe sections included in the two or more probe cards be in contact with external terminal sections of the plurality of chips.

REFERENCES:
patent: 5254939 (1993-10-01), Anderson et al.
G. A. Perone, "The Economics of the Memory Tester Decision", IEEE Catalog No. 81CH1693-1, 1981 International Test Conference Oct. 1981.

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