Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1993-01-15
1995-08-22
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
3241581, G01R 3102
Patent
active
054443865
ABSTRACT:
A probing apparatus including probes contacting with electrode pads of the semiconductor wafer for measuring a semiconductor wafer in which a probe card is safely and individually installed and a wafer testing system in which a plurality of probe cards are efficiently used are disclosed. A probing apparatus includes moving means 4 for receiving a card holder 2 accommodating a probe card 1, moving the card holder 2 into a position just below a pin socket 3 to which the probe card 1 is attached, and lifting the card holder 2, and attaching means 5 for attaching the probe card 1 to the pogo pin socket 3.
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Karlsen Ernest F.
Tokyo Seimitsu Co. Ltd.
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