Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-09-02
1988-05-24
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158P, G01R 3102, G01R 106
Patent
active
047468572
ABSTRACT:
A probing apparatus is used to measure electrical characteristics of a semiconductor device formed on a wafer. The apparatus includes means for holding the wafer in a vertical or slightly leaned position on a frame, a contact needle, three-directional drive means for holding the needle on the frame movably both vertically and horizontally along the device-bearing surface of the wafer and for bringing the needle into releasable contact with a desired portion of the device-bearing surface of the wafer, and a microscope provided in such a way that the tip of the needle is seen substantially at the center of the field of view, said microscope being movable together with the needle along the device-bearing surface of the wafer.
REFERENCES:
patent: 4518914 (1985-05-01), Okubo et al.
Lockwood et al.; "Probe Cap . . . "; IBM Tech. Dis. Bull.; vol 22; No. 6; Nov., 1979; pp. 2343-2344.
Baxter et al.; "Mass Alignment . . . "; Western Electric Tech. Dig.; No. 38; Apr. 1975; pp. 5-6.
Kono Motohiro
Koyama Yoshihiro
Nakagawa Yoshiyuki
Sakai Takamasa
Umaba Takayuki
Danippon Screen Mfg. Co. Ltd.
Karlsen Ernest F.
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