Prober for testing devices in a repeat structure on a substrate

Details Prober for testing devices in a repeat structure on a substrate Prober for testing devices in a repeat structure on a substrate

2011-04-26

2011-04-26

Velez, Roberto (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750160, C324S750190, C324S756020

Reexamination Certificate

active

07932737

ABSTRACT:
A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.

REFERENCES:
patent: 6435045 (2002-08-01), Chen et al.
patent: 7436171 (2008-10-01), Lou et al.
patent: 7642800 (2010-01-01), Ku et al.

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