Prober and testing apparatus using same

Details Prober and testing apparatus using same Prober and testing apparatus using same

2006-06-06

2006-06-06

Ro, Bentsu (Department: 2837)

Electricity: motive power systems

With signals, meters, recorders or testing devices

C318S649000, C324S755090, C324S701000

Reexamination Certificate

active

07057365

ABSTRACT:
A prober includes a frame having a frame ground terminal, a chuck stage, servo motors for driving the chuck stage, servo amplifiers connected to the servo motors, first floating mounts on which the servo amplifiers are provided, a second floating mount on which the servo motor is provided. The first floating mounts are electrically insulated from the frame and have first ground terminals connected to the ground terminals of the servo amplifiers. The second floating mount is electrically insulated from the frame and has a second ground terminal connected to the ground terminal of the servo motor. The prober further includes shielded cables connecting the servo amplifiers and the servo motors, a first wire connecting the first ground terminal and the frame ground terminal and also connecting the first ground terminal and the second floating mount, and second wires connecting the shielded cables and the frame ground terminal.

REFERENCES:
patent: 5266894 (1993-11-01), Takagi et al.
patent: 6208571 (2001-03-01), Ikeda et al.
patent: 6714888 (2004-03-01), Mori et al.
patent: 6857093 (2005-02-01), Ooishi
patent: 2001-296547 (2001-10-01), None

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