Prober and probe method

Details Prober and probe method Prober and probe method

1998-05-04

2000-10-31

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324765, G01R 3100, G01M 1100

Patent

active

06140828&

ABSTRACT:
A prober includes a probe card, a main chuck, a shaft member fixed on and extending downwardly from the main chuck, an X table and Y table for retaining the shaft member by use of a guide to be freely movable in a vertical direction, and a contact body fixed on the shaft member. The undersurface of the contact body is made parallel to the mounting surface of the main chuck. The prober further includes an elevation body whose center coincides with an extension line downwardly extending from the test center of the probe card, and an elevation body elevating mechanism for vertically moving the elevation body and a ball provided on the upper portion of the elevation body is slidably set in contact with the undersurface of the contact body.

REFERENCES:
patent: 5321453 (1994-06-01), Mori et al.
patent: 5404111 (1995-04-01), Mori et al.
patent: 5604446 (1997-02-01), Sano

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