Prober

Details Prober Prober

2005-08-23

2005-08-23

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S758010, C324S765010

Reexamination Certificate

active

06933736

ABSTRACT:
This invention is a probe apparatus including: a stage onto which a substrate to be processed is placed, a semiconductor device having a plurality of groups of electrode pads being formed on the substrate to be processed; a probe-card holding mechanism that holds a probe card provided with a group of probe needles corresponding to each group of electrode pads; and a driving mechanism that moves the stage and causes the group of probe needles to successively come in contact with the respective groups of electrode pads. A converting device that converts mechanical vibration energy generated in components of the probe apparatus into electrical energy, and an electrical circuit that discreates an electrical current based on the electric energy converted by the converting device are further provided.

REFERENCES:
patent: 5436571 (1995-07-01), Karasawa
patent: 5642056 (1997-06-01), Nakajima et al.
patent: 5814733 (1998-09-01), Khoury et al.
patent: 05-149379 (1993-06-01), None
patent: 06-069321 (1994-03-01), None
patent: 10-082204 (1998-03-01), None
patent: 11-304837 (1999-11-01), None
patent: 2000-357824 (2000-12-01), None
patent: 2001-189354 (2001-07-01), None
Modern Dictionary of Electronics Sixth Edition Rudolf F. graf.
Communication In Cases For Which No Other Form is Applicable (Form PCT/IB/345) issued for PCT/JP2003/000084 (Jul. 1992).
New Corrected Form PCT/IB/308 issued for PCT/JP2003/000084 (Apr. 2002).

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