Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2001-01-22
2001-12-25
Lee, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C250S306000
Reexamination Certificate
active
06333497
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a probe having a tip (stylus) with a micro aperture for detecting or irradiating evanescent light and used in, e.g., a near-field optical microscope or the like, a near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and a method of manufacturing the probe.
2. Related Background Art
Recently, since the development of a scanning tunneling microscope (to be abbreviated as an “STM” hereinafter) that can directly observe the electron structure of surface atoms of a conductor (G. Binnig et al., Phys. Rev. Lett, 49, 57 (1982)) to allow high-resolution measurement of real space images irrespective of single crystal and amorphous, a scanning probe microscope (to be abbreviated as an “SPM” hereinafter) has been enthusiastically studied in the field of microstructural evaluation of materials.
As an SPM, a scanning tunneling microscope (STM), atomic force microscope (AFM), magnetic force microscope (MFM), and the like for detecting the surface structure using a tunneling current, atomic force, magnetic force, light, and the like obtained by bringing a probe with a micro tip close to a sample are known.
As one developed form of the STM, a scanning near-field optical microscope (to be abbreviated as an “SNOM” hereinafter) [Durig et al., J. Appl. Phys. 59, 3318 (1986)] for examining the sample surface by detecting evanescent light leaking out from a micro aperture at the sharp probe distal end using an optical probe from the sample surface has been developed.
Furthermore, a photon STM (to be abbreviated as a “PSTM” hereinafter) [Reddick et al., Phys. Rev. B39, 767 (1989)] as a one kind of SNOM for examining the sample surface by making light enter the sample rear surface via a prism under the total reflection condition, and detecting evanescent light leaking out through the sample surface using an optical probe from the sample surface has also been developed.
In the SNOM, since the distal end diameter of the optical probe determines resolution, the probe surface is shielded from light and a micro aperture is formed at the distal end to reduce the exit size of light. As a method of forming such micro aperture, the following method has been proposed. That is, a metal is coated on the intersection of the cleaved surfaces of a transparent crystal, and the crystal is pressed against a hard surface to remove the metal at the intersection portion and expose the intersection, thus forming a micro aperture (see
FIG. 14A
) (European Patent No. EP0112402). In another method, the distal end of an optical fiber is sharpened by etching, and a metal is evaporated on the optical fiber from only a given direction while rotating the fiber so as to form a portion on which no metal is evaporated, thereby forming a micro aperture (see FIG.
14
B).
However, of the above-mentioned prior arts, when the optical probe has no micro aperture like in the PSTM, stray light other than evanescent light such as light scattered by the three-dimensional pattern on the sample surface is detected, thus dropping the resolution.
On the other hand, the prior arts shown in
FIGS. 14A and 14B
have poor productivity and can hardly attain integration and size reduction of the micro aperture since they present micro aperture formation processes for only one fiber probe. Also, high cost is required due to complicated, time-consuming processes. Furthermore, it is hard to strictly control the diameter of the micro aperture, resulting in poor reproducibility. If an EB working apparatus or FIB working apparatus is used, formation of an aperture with a diameter of 100 nm or less may be realized in principle. However, positioning control of such apparatus is complicated, and variations are readily produced. Moreover, since such working method must be done for each point, the yield is poor.
SUMMARY OF THE INVENTION
The present invention has been made in consideration of the prior arts' problems, and has as its object to provide:
a micro aperture or a tip with the micro aperture
(1) which can be formed with high reproducibility,
(2) which can be easily integrated on a substrate, and can reduce variations of aperture diameter upon forming a plurality of micro apertures, and
(3) which has high reproducibility since it can be formed in a batch process; and
(4) an integrated, compact optical probe, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the micro aperture or the tip with the micro aperture, and a method of manufacturing the micro aperture or the tip with the micro aperture, and a probe.
In order to achieve the above object, there is provided a probe for detecting or irradiating light, comprising:
a displaceable support member supported on a substrate;
a tip formed on the support member and having a micro aperture; and
a bonding layer for bonding the tip onto the support member.
In order to achieve the above object, there is also provided a near-field optical microscope comprising the above-mentioned probe.
In order to achieve the above object, there is also provided a recording/reproduction apparatus comprising the above-mentioned probe.
In order to achieve the above object, there is also provided an exposure apparatus comprising the above-mentioned probe.
In order to achieve the above object, there is also provided a method of manufacturing a probe for detecting or irradiating light, comprising the steps of:
forming a recess portion on a surface of a first substrate;
forming a peeling layer on the first substrate including the recess portion;
forming a tip consisting of a light transmission material on the peeling layer including the recess portion;
forming a bonding layer on a second substrate;
bonding and transferring the tip onto the bonding layer; and
forming a support member for supporting the tip by removing a portion of the second substrate.
REFERENCES:
patent: 5260567 (1993-11-01), Kuroda et al.
patent: 5294790 (1994-03-01), Ohta et al.
patent: 5354985 (1994-10-01), Quate
patent: 5517280 (1996-05-01), Quate
patent: 5546375 (1996-08-01), Shimada et al.
patent: 5548117 (1996-08-01), Nakagawa
patent: 5770856 (1998-06-01), Fillard et al.
patent: 5866021 (1999-02-01), Yagi et al.
patent: 0 112 402 (1984-07-01), None
patent: 0 786 642 (1997-07-01), None
patent: 2-098849 (1990-04-01), None
patent: 4-090152 (1992-03-01), None
Radmacher, M., et al., “Scanning Nearfield Optical Microscope Using Microfabricated Probes”, Review of Scientific Instruments, vol. 65, No. 8, pp. 2737-2738 (Aug. 1994).
Akamine, S., et al., “Low Temperature Thermal Oxidation Sharpening of Microcast Tips”, Journal of Vacuum Science & Technology, vol. 10, No. 5, pp. 2307-2310 (Sep. 1992).
Van Hulst, N.F., et al., “Near-Field Optical Microscope Using a Silicon-Nitride Probe”, vol. 62, No. 5, pp. 461-463 (Feb. 1993).
Kuroda Ryo
Shimada Yasuhiro
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Lee Que T.
LandOfFree
Probe with tip having micro aperture for detecting or... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Probe with tip having micro aperture for detecting or..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe with tip having micro aperture for detecting or... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2587614