Probe with microstrip transmission lines

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324158F, G01R 3102

Patent

active

052218953

ABSTRACT:
A probe for testing integrated circuits includes a stiff elastic substrate including a conductive plane, the substrate having a major portion with fingers projecting therefrom in cantilever fashion. A layer of dielectric material is adhered to the substrate and has a main surface remote from the substrate. A plurality of conductor runs are adhered to the layer of dielectric material at the main surface thereof. The conductor runs extend over at least some of the fingers and are configured to form transmission lines when the conductive plane is connected to a reference potential level.

REFERENCES:
patent: 4574235 (1986-03-01), Kelly et al.
patent: 4764723 (1988-08-01), Strid
patent: 4891585 (1990-01-01), Janko et al.
patent: 4943768 (1990-07-01), Niki et al.
patent: 5061854 (1991-10-01), Ikeda

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