Probe with electrostatic actuation and capacitive sensor

Details Probe with electrostatic actuation and capacitive sensor Probe with electrostatic actuation and capacitive sensor

2011-03-01

2011-03-01

Nguyen, Vincent Q (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S755070, C073S105000

Reexamination Certificate

active

07898266

ABSTRACT:
A supported probe device that has a probe tip and probe body, the probe body having a sample facing surface and an opposing surface. The probe tip and a first electrode are on the sample facing surface. A second electrode is present on the probe body opposing surface. A third electrode is spaced from the second electrode, so that the second electrode is between the third electrode and the probe body. A first DC voltage source is electrically coupled to the first electrode, as is a first sensing circuit. A second DC voltage source is electrically coupled to the second electrode, and an AC voltage source electrically coupled to the third electrode. The probe body may be cantilevered.

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U.S. Appl. No. 11/933,729, filed Nov. 1, 2007, Inventor: Lee.

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