Probe with contact portion including Au and Cu alloy

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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Details

324 725, 324158F, G01R 1073, G01R 3102

Patent

active

052668959

ABSTRACT:
A probe to be electrically connected to an internal circuit of a semiconductor element, comprising a contact portion to be brought into pressure contact with an electrode formed on the semiconductor element, wherein the contact portion is made of an alloy consisting of Au, Cu, and an inevitable impurity. The contact resistance between the probe and electrode is low, and is maintained low in a stable manner even if the probe is repeatedly used.

REFERENCES:
patent: 3613001 (1971-10-01), Hastetter
patent: 3781681 (1973-12-01), Wagner et al.
patent: 4225819 (1980-09-01), Grau et al.
patent: 4574235 (1986-03-01), Kelly et al.

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