Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1991-11-29
1993-11-30
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 725, 324158F, G01R 1073, G01R 3102
Patent
active
052668959
ABSTRACT:
A probe to be electrically connected to an internal circuit of a semiconductor element, comprising a contact portion to be brought into pressure contact with an electrode formed on the semiconductor element, wherein the contact portion is made of an alloy consisting of Au, Cu, and an inevitable impurity. The contact resistance between the probe and electrode is low, and is maintained low in a stable manner even if the probe is repeatedly used.
REFERENCES:
patent: 3613001 (1971-10-01), Hastetter
patent: 3781681 (1973-12-01), Wagner et al.
patent: 4225819 (1980-09-01), Grau et al.
patent: 4574235 (1986-03-01), Kelly et al.
Karlsen Ernest F.
Tokyo Electron Yamanashi Limited
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