Probe unit and inspection head

Details Probe unit and inspection head Probe unit and inspection head

1997-05-16

2000-03-21

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 725, 324754, G01R 3102, G01R 106

Patent

active

060407042

ABSTRACT:
A probe unit comprises a support member having an edge extending in a first direction parallel to the surface of a plate-like test substance; and a plurality of needle-like probes disposed on the edge and extended in a third direction intersecting the first direction and a second direction perpendicular to the surface of the test substance. The plurality of probes are divided into at least a first group and a second group arranged at intervals in the second direction.

REFERENCES:
patent: 4480223 (1984-10-01), Aigo
patent: 4523144 (1985-06-01), Okubo et al.
patent: 4719417 (1988-01-01), Evans
patent: 5606263 (1997-02-01), Yoshizawa et al.

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