Probe straightness measuring method

Details Probe straightness measuring method Probe straightness measuring method

2011-01-11

2011-01-11

Le, John H (Department: 2857)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Position measurement

C033S502000, C033S549000, C033S561000, C702S152000

Reexamination Certificate

active

07869970

ABSTRACT:
A probe straightness measuring method includes: placing a measurement jig having a measurement reference surface with a known profile error on a stage surface of an XY stage so that the measurement reference surface is slanted in a moving direction of the XY stage; measuring a displaced position of the measurement piece by a displacement detector of the probe each time the XY stage is moved for a predetermined distance while controlling a driving actuator so that the measurement piece of a probe touches the measurement reference surface at a constant pressure; and calculating a straightness error of a measurement-piece moving mechanism on a basis of a measured position of the measurement piece obtained in the measuring, a nominal position of the measurement piece obtained by a calculation and a slant angle of the measurement reference surface.

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