Probe station with two platens

Details Probe station with two platens Probe station with two platens

2008-05-06

2008-05-06

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120, C324S761010, C324S762010

Reexamination Certificate

active

07368925

ABSTRACT:
A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.

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