Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-11-21
2006-11-21
Nguyen, Ha Tran (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S754090, C324S765010, C324S1540PB
Reexamination Certificate
active
07138813
ABSTRACT:
To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.
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Cowan Clarence E.
Dunklee John L.
Tervo Paul A.
Cascade Microtech, Inc.
Chan Emily Y
Chernoff Vilhauer McClung & Stenzel LLP
Nguyen Ha Tran
LandOfFree
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