Probe station having multiple enclosures

Details Probe station having multiple enclosures Probe station having multiple enclosures

2007-07-31

2007-07-31

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

Reexamination Certificate

active

11450099

ABSTRACT:
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.

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