Probe station having inner and outer shielding

Details Probe station having inner and outer shielding Probe station having inner and outer shielding

1997-06-06

1999-12-14

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

158761, G01R 3102

Patent

active

060022639

ABSTRACT:
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.

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