Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1997-06-06
1999-10-05
Brown, Glenn W.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324754, G01R 104, G01R 118, G01R 3100
Patent
active
059630272
ABSTRACT:
A probe station for probing a test device has a chuck assembly substantially enclosed by an environment control enclosure and laterally movable relative to such enclosure. The environment control enclosure includes a flexible wall assembly interconnected with the chuck assembly to enable such lateral movement thereof along mutually perpendicular directions while maintaining the integrity of the enclosure. The flexible wall assembly has flexible pleats formed therein extending along respective different lateral directions to enable such lateral movement.
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Brown Glenn W.
Cascade Microtech, Inc.
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