Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2007-11-21
2009-08-25
Nguyen, Ha Tran T (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
Reexamination Certificate
active
07579854
ABSTRACT:
A prober is described that is suitable for testing of semiconductor substrates under atmospheric conditions that deviate from ambient conditions. The prober includes a chuck for mounting of a semiconductor substrate and a probe holder for mounting of test tips for electrical contacting of the semiconductor substrate. The semiconductor substrate and test tips are arranged within a housing sealed relative to the surrounding atmosphere. The housing comprises two housing parts joined with a seal. The seal can be inflated with two different pressures and is less deformable at higher pressure. For testing of the semiconductor substrate, coarse positioning of the semiconductor substrate relative to the test tips occurs under atmospheric conditions and then fine positioning with the sealed housing and deformable seal before the lower deformability of the seal is produced at higher pressure in the seal and the semiconductor substrate is contacted by the test tips and tested.
REFERENCES:
patent: 5835997 (1998-11-01), Yassine
patent: 6124725 (2000-09-01), Sato
patent: 2006/0205322 (2006-09-01), Kalenian et al.
Dietrich Claus
Kanev Stojan
Kiesewetter Jörg
Kreissig Stefan
Campbell Shaun
Cardona, Esq. Victor A.
Heslin Rothenberg Farley & & Mesiti P.C.
Nguyen Ha Tran T
SUSS Microtec Test Systems GmbH
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