Probe station adapter for backside emission inspection

Details Probe station adapter for backside emission inspection Probe station adapter for backside emission inspection

1997-07-14

1999-09-28

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324753, 324754, G01R 3126, G01R 31308

Patent

active

059594616

ABSTRACT:
An adapter for holding a silicon wafer in an inverted position of a probe station to allow backside emission testing is described. The wafer is positioned in a carrier having an opening therethrough for backside emission testing while the wafer is energized and probed beneath the carrier. A special probe card holder is provided with a self-leveling feature by means of a leveling frame on the probe card holder cooperating with the wafer carrier.

REFERENCES:
patent: 4575676 (1986-03-01), Palkuti
patent: 4706019 (1987-11-01), Richardson
patent: 4755874 (1988-07-01), Esrig et al.
patent: 5136373 (1992-08-01), Kamiya et al.
patent: 5493236 (1996-02-01), Ishii et al.
patent: 5661408 (1997-08-01), Kamieniecki et al.
Hypervision BEAMS product brochure (4 pages) (Date unavailable).

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