Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2005-07-05
2005-07-05
Pert, Evan (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S765010
Reexamination Certificate
active
06914423
ABSTRACT:
A chuck assembly includes a rotational member and an auxiliary chuck. The rotational member is suitable for supporting a chuck thereon wherein the rotational member is rotatable with respect to the chuck assembly. The auxiliary chuck is free from rotating with respect to the chuck assembly.
REFERENCES:
patent: 4786867 (1988-11-01), Yamatsu
patent: 5457398 (1995-10-01), Schwindt et al.
patent: 5521522 (1996-05-01), Abe et al.
patent: 5561377 (1996-10-01), Strid et al.
patent: 5604444 (1997-02-01), Harwood et al.
Dunklee John
Nordgren Greg
Cascade Microtech, Inc.
Chernoff Vilhauer & McClung & Stenzel
Nguyen Tung X.
Pert Evan
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