Probe sensor with multi-dimensional optical grating

Details Probe sensor with multi-dimensional optical grating Probe sensor with multi-dimensional optical grating

2010-03-24

2010-10-05

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

C356S622000

Reexamination Certificate

active

07808656

ABSTRACT:
A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe.

REFERENCES:
patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5610715 (1997-03-01), Yoshii et al.
patent: 2007/0103697 (2007-05-01), Degertekin

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