Probe pins zero-point detecting method, and prober

Details Probe pins zero-point detecting method, and prober Probe pins zero-point detecting method, and prober

2006-04-04

2006-04-04

Nguyen, Vinh P. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07023226

ABSTRACT:
A zero-point detecting method of this invention is performed prior to testing the electrical characteristics of a wafer by bringing an object to be tested on a stage and probes of a probe card into contact with each other. The surface of a zero-point detection plate is made of a conductive material (e.g., copper). The zero-point detection plate is used to detect a zero point as a position where the surface of the object to be tested comes into contact with the probe pins.

REFERENCES:
patent: 6160415 (2000-12-01), Jung
patent: 6523420 (2003-02-01), Lee et al.
patent: 6777968 (2004-08-01), Kobayashi et al.
patent: 4-340734 (1992-11-01), None
patent: 2002-139542 (2002-05-01), None
patent: 2004-093450 (2004-03-01), None
patent: 2004-156984 (2004-06-01), None

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