Probe needle, method for manufacturing the probe needle and...

Details Probe needle, method for manufacturing the probe needle and... Probe needle, method for manufacturing the probe needle and...

2005-08-29

2009-11-17

Hollington, Jermele M (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07619424

ABSTRACT:
A method for manufacturing a probe needle having beams and a contactor placed on tips of the beams comprises preparing a Si wafer20, forming a seed layer21on the Si wafer20, and forming grooves in a desired shape of the beams on the seed layer21by patterning a photoresist23. Subsequently, the grooves are filled up with metal-plated layers24a, 24bto form the desired shape of beams.

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