Probe needle for testing semiconductor chips and method for...

Details Probe needle for testing semiconductor chips and method for... Probe needle for testing semiconductor chips and method for...

2007-05-01

2007-05-01

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S761010, C324S754090

Reexamination Certificate

active

10826954

ABSTRACT:
A probe needle for testing semiconductor chips includes one end that is fixed in a holding element and a free end that includes a contact tip. The probe needle is provided—at least on the surface of the contact tip—with a layer consisting of a chemically inert, electroconductive material which is hard in relation to the material of contact surfaces of the semiconductor chips. For example, the layer can be titanium nitride.

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